SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests -
Abstract
The purpose of this Standard is to provide a test method
for measurement of mass flow controller (MFC) transient characteristics.
This Standard is intended to establish a common basis for
communication between users and suppliers of semiconductor equipment. It
provides terminology and methodology aimed at eliminating confusion regarding
what previously has been referred to as MFC ‘response time.’ The conditions and
procedures are given for determining and expressing the transient
characteristics of a MFC to a step change in set point. This Standard applies
to mass flow controllers for gases used in semiconductor fabrication equipment.
Referenced SEMI Standards
(purchase separately)
None.
Revision History
SEMI E17-0318 (technical revision)
SEMI E17-1011 (technical revision)
SEMI E17-0600 (Reapproved 0307)
SEMI E17-0600 (technical revision)
SEMI E17-91 (first published)
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